A cryogenic vacuum pump utilizes a 10K (-263℃) cryocooler as its cold source, achieving oil-free high vacuum through the principles of cryogenic condensation and adsorption. Cryogenic vacuum pumps are widely used in:

1. Semiconductor, integrated circuit, and optoelectronic device coating processes

2. Optical lens coating

3. Magnetron sputtering coating production lines

4. Space environment simulation

5. Vacuum exhaust stations

Main Features of Cryogenic Vacuum Pumps 

1. Cryogenic vacuum pumps are adsorption-type pumps that do not require a forepump during operation.

2. Cryogenic vacuum pumps need regeneration.

3. Cryogenic vacuum pumps have varying pumping speeds and capacities for different gases.